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The present invention relates to a semiconductor device, and more particularly, to a semiconductor device, a fabrication method thereof, and a semiconductor module including the semiconductor device.
2. Description of the Related Art
In recent years, there has been proposed a technology of forming a power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) element and a power IC (Integrated Circuit) chip having the power MOSFET element on the same semiconductor substrate in order to increase the integration of the power IC. FIG. 11 is a sectional view of a semiconductor module having a power IC chip and a power MOSFET element formed on the same semiconductor substrate according to a conventional technology. As shown in FIG. 11, the semiconductor module according to the conventional technology includes a first semiconductor substrate 1, a power IC chip 2, a power MOSFET element 3, a Schottky diode 4, and a second semiconductor substrate 5. The first semiconductor substrate 1 is formed by sequentially laminating a first semiconductor chip 11, a first silicon substrate 12, a first insulation film 13, and a first wiring 14. The first semiconductor chip 11 is formed by sequentially laminating a first semiconductor substrate 11, a first channel-forming region 111 and a first source region 112. The first semiconductor substrate 11 is formed by sequentially laminating a first semiconductor chip layer 11a made of silicon and a first silicon substrate layer 11b made of single crystalline silicon
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